氣體 |
測(cè)量范圍 |
分辨率(針對(duì)缺省設(shè)置) |
乙醛 Acetaldehyde |
0-200 ppm |
1 ppm |
乙炔 Acetylene |
0-100 ppm |
1 ppm |
丙烯腈 Acrylonitrile |
0-100ppm |
1 ppm |
氨氣 Ammonia |
0-200 ppm |
1 ppm |
胂 Arsine |
0-20 ppm |
0.01 ppm (PH3) |
溴 Bromine |
0-20 ppm |
0.05 ppm (Cl2) |
丁二烯 Butadiene |
0-100 ppm |
1 ppm |
二氧化碳 Carbon Dioxide |
0-5% Vol. |
0.1% Vol. |
一氧化碳 Carbon Monoxide |
0-2000 ppm |
1 ppm |
一氧化碳 Carbon Monoxide |
0-10,000 ppm |
1 ppm |
氯氣 Chlorine |
0-20 ppm |
0.05 ppm |
二氧化氯 Chlorine Dioxide |
0-20 ppm |
0.05 ppm (Cl2) |
乙硼烷 Diborane |
0-1 ppm |
0.01 ppm (PH3) |
二乙胺 Diethylamine |
0-100 ppm |
1 ppm |
二甲胺 Dimethylamine |
0-100 ppm |
1 ppm |
二甲基硫醚 Dimethyl Sulfide |
0-40 ppm |
1 ppm |
乙醇 Ethanol |
0-300 ppm |
1 ppm |
乙烯 Ethylene |
0-100 ppm |
1 ppm |
環(huán)氧乙烷 Ethylene Oxide |
0-200 ppm |
1 ppm |
甲醛Formadehyde |
0-200 ppm |
1 ppm |
氟 Fluorine |
0-20 ppm |
0.05 ppm (Cl2) |
鍺烷Germane |
0-20 ppm |
0.01 ppm (PH3) |
氫氣 Hydrogen |
0-2000 ppm |
1 ppm |
氰化氫 Hydrogen Cyanide |
0-50 ppm |
0.1 ppm |
氟化氫/氯化氫Hydrogen Fluoride/Hydrogen Chloride(需配傳感器帽) |
0-30 ppm |
0.1 ppm (HCl) |
過氧化氫 Hydrogen Peroxide |
0-20 ppm |
0.1 ppm |
硒化氫 Hydrogen Selenide |
0-1 ppm |
0.01 ppm (PH3) |
硫化氫 Hydrogen Sulfide |
0-100 ppm |
1 ppm |
硫化氫 Hydrogen Sulfide |
0-1000 ppm |
1 ppm |
異丁烯 Iso-Butene |
0-300 ppm |
1 ppm |
異丙醇Iso-Propyl Alcohol |
0-300 ppm |
1 ppm |
甲醇 Methanol |
0-200 ppm |
1 ppm |
甲胺 Methyl Amine |
0-100 ppm |
1 ppm |
一氧化氮 Nitric Oxide |
0-200 ppm |
1 ppm |
二氧化氮Nitrogen Dioxide |
0-50 ppm |
0.1 ppm |
氧氣 Oxygen |
0-25% Vol. |
0.1% Vol. |
光氣 Phosgene |
0-3 ppm |
0.01 ppm |
磷化氫 Phosphine |
0-20 ppm |
0.01 ppm |
磷化氫 Phosphine |
0-1000 ppm |
1 ppm |
丙烯 Propylene |
0-100 ppm |
1 ppm |
氧化丙烯Propylene Oxide |
0-200 ppm |
0.5 ppm |
四氫化硅 Silane |
0-50 ppm |
0.01 ppm (PH3) |
苯乙烯 Styrene |
0-100 ppm |
1 ppm |
二氧化硫 Sulfur Dioxide |
0-100 ppm |
0.1 ppm |
四氫噻吩Tetrahydrothiophene |
0-40 ppm |
1 ppm |
特丁醇 tert-Butyl Mercaptan |
0-40 ppm |
1 ppm |
三乙胺 Triethylamine |
0-100 ppm |
1 ppm |
三甲胺 Trimethylamine |
0-100 ppm |
1 ppm |
乙烯基乙酸酯 Vinyl Acetate |
0-100 ppm |
1 ppm |
氯乙烯 Vinyl Chloride |
0-100 ppm |
1 ppm |